Investigation of Ti0.54Al0.46/Ti0.54Al0.46N multilayer films deposited by reactive gas pulsing process by nano-indentation and electron energy-loss spectroscopy
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BSO - Titre
Investigation of Ti 0.54 Al 0.46 /Ti 0.54 Al 0.46 N multilayer films deposited by reactive gas pulsing process by nano-indentation and electron energy-loss spectroscopy
